01
Failure Evaluation
A useful repair scope starts with failure symptoms, diagnostic history, photos, alarms, process impact, and known previous work.
Define the problem first
Complete information helps determine whether repair, refurbishment, replacement, or further troubleshooting is the appropriate path.
02
Electronics & Power
Support may include generators, power supplies, drivers, controllers, and circuit boards used in semiconductor equipment.
Serviceability varies
Evaluation depends on component condition, documentation, parts availability, and the ability to verify function after repair.
03
Mechanical Assemblies
Robots, valves, actuators, chamber hardware, and other mechanical assemblies may be candidates for repair or refurbishment.
Wear and contamination review
Materials, tolerances, seals, wear surfaces, and process exposure influence the recommended work scope.
04
Tool Refurbishment
Broader projects may involve chambers, modules, sub-systems, or complete legacy tools requiring coordinated inspection and restoration.
Project-specific planning
Configuration, missing components, facilities, installation needs, and acceptance criteria should be established before work begins.